Takuya Hamada

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Speaker, Author, Co-Author

Thu. Sep 19, 2019 9:30 AM - 11:45 AM E308 (E308)

Oral presentation
| 17 Nanocarbon Technology
| 17.3 Layered materials

[19a-E308-1~9] 17.3 Layered materials

9:45 AM - 10:00 AM

[19a-E308-2] Sheet resistance reduction of Sputtered MoS₂ Film by Cl₂ Plasma Treatment

〇Takuya Hamada¹, Taiga Horiguchi¹, Tetsuya Tatsumi², Shigetaka Tomiya², Masaya Hamada¹, Takuya Hoshii¹, Kuniyuki Kakushima¹, Kazuo Tsutsui³, Hitoshi Wakabayashi^1,2 (1.School of Engineering, Tokyo Tech, 2.Research Institute of the Earth Inclusive Sensing, Tokyo tech, 3.IIR, Tokyo tech)