Kaname Imokawa

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Speaker, Author, Co-Author

Wed. Sep 18, 2019 9:30 AM - 11:45 AM E304 (E304)

Oral presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[18a-E304-1~9] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

9:45 AM - 10:00 AM

△ [18a-E304-2] Characterization of Low-temperature Poly-Si Thin-film Transistors Fabricated by Grain-Growth Controlled Selective-Laser-Annealing

〇Kaname Imokawa^1,2, Huminobu Hamano¹, Daisuke Nakamura¹, Kaori Saito³, Jun Gotoh³, Tetsuya Goto⁴, Hiroshi Ikenoue^1,2 (1.Kyushu Univ., 2.Dept. of Gigaphoton, Kyushu Univ., 3.V-Technology, 4.Tohoku Univ.)

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