Hideki Sakurai

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Speaker, Author, Co-Author

Wed. Sep 18, 2019 1:00 PM - 6:00 PM N302 (N302)

Oral presentation
| 13 Semiconductors
| 13.7 Compound and power electron devices and process technology

[18p-N302-1~18] 13.7 Compound and power electron devices and process technology

3:15 PM - 3:30 PM

[18p-N302-9] Demonstration of acceptor formation in Mg-ion implanted GaN by high pressure annealing

〇Hideki Sakurai^1,2,3, Shinji Yamada^1,2,3, Akihiko Koura³, Masahiro Horita^1,2, Michal Bockowski^1,4, Jun Suda^1,2, Tetsu Kachi¹ (1.Nagoya Univ. IMaSS, 2.Nagoya Univ., 3.ULVAC ISET, 4.UNIPRESS)

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