Shuichi Murakami

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Speaker, Author, Co-Author

Thu. Sep 19, 2019 9:00 AM - 12:00 PM E304 (E304)

Oral presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[19a-E304-1~12] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

10:00 AM - 10:15 AM

[19a-E304-5] Characterization of Piezoelectric MEMS Vibration Energy Harvesters Under Non-Gaussian Random Oscillation

〇Shuichi Murakami¹, Takeshi Yoshimura², Yusuke Kanaoka¹, Kazuki Tsuda¹, Akira Hosoyama¹, Shogo Horiguchi¹, Kazuo Satoh¹, Kensuke Kanda³, Norifumi Fujimura² (1.ORIST, 2.Osaka Pref. Univ., 3.Univ. of Hyogo)

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