Taiga Horiguchi

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Speaker, Author, Co-Author

Thu. Sep 19, 2019 9:30 AM - 11:45 AM E308 (E308)

Oral presentation
| 17 Nanocarbon Technology
| 17.3 Layered materials

[19a-E308-1~9] 17.3 Layered materials

9:30 AM - 9:45 AM

[19a-E308-1] Sheet-Resistance Reduction of Sputtered-MoS₂ Film by SF₆Plasma Treatment

〇Taiga Horiguchi¹, Takuya Hamada¹, Tetsuya Tatsumi², Shigetaka Tomiya², Takuya Hoshii¹, Kuniyuki Kakushima¹, Kazuo Tsutsui³, Hitoshi Wakabayashi^1,2 (1.School of Engineering, Tokyo Tech, 2.Research Institute of the Earth Inclusive Sensing, Tokyo Tech, 3.IIR, Tokyo Tech)