Soichiro Matsunaga

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Speaker, Author, Co-Author

Thu. Sep 19, 2019 9:30 AM - 12:00 PM E312 (E312)

Oral presentation
| 6 Thin Films and Surfaces
| 6.2 Carbon-based thin films

[19a-E312-1~9] 6.2 Carbon-based thin films

9:45 AM - 10:00 AM

[19a-E312-2] Carbon- coating of facetless electron source for increasing beam brightness

〇Soichiro Matsunaga¹, Yasunari Sohda¹ (1.R&D group Hitachi Ltd.)

Fri. Sep 20, 2019 1:30 PM - 3:30 PM PB2 (PB)

Poster presentation
| 7 Beam Technology and Nanofabrication
| 7 Beam Technology and Nanofabrication (Poster)

[20p-PB2-1~18] 7 Beam Technology and Nanofabrication (Poster)

1:30 PM - 3:30 PM

[20p-PB2-2] Facetless carbon- coating electron source for increasing brightness of electron beam

〇Soichiro Matsunaga¹, Yasunara Sohda¹ (1.R&D group Hitachi Ltd.)