Kuen-Yu Tsai

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Speaker, Author, Co-Author

Thu. Sep 19, 2019 1:30 PM - 5:30 PM E302 (E302)

Symposium (Oral)
| Symposium (technical)
| Advanced ion microscopy? Application for future nano scale materials and devices

[19p-E302-1~8] Advanced ion microscopy? Application for future nano scale materials and devices

2:00 PM - 2:30 PM

▲ [19p-E302-2] Helium Ion Beam Lithography with High Patterning Fidelity

Chien-Lin Lee¹, Jia-Syun Cai¹, Sheng-Wei Chien¹, 〇Kuen-Yu Tsai¹ (1.Nat. Taiwan Univ.)