Tomohiro Kuyama

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Speaker, Author, Co-Author

Thu. Sep 19, 2019 1:45 PM - 5:45 PM E305 (E305)

Oral presentation
| 13 Semiconductors
| 13.3 Insulator technology

[19p-E305-1~15] 13.3 Insulator technology

2:00 PM - 2:15 PM

△ [19p-E305-2] Quantitative Analysis of Plasma-induced Defect Density in Si-based Dielectric Films Using Conductance Method

〇Tomohiro Kuyama¹, Keiichiro Urabe¹, Koji Eriguchi¹ (1.Kyoto Univ.)