Takayuki Hagiwara

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Speaker, Author, Co-Author

Thu. Sep 19, 2019 1:45 PM - 5:45 PM E305 (E305)

Oral presentation
| 13 Semiconductors
| 13.3 Insulator technology

[19p-E305-1~15] 13.3 Insulator technology

2:15 PM - 2:30 PM

[19p-E305-3] Effect of process conditions on properties of an OER- CVD SiO₂ film at room temperature

〇Takayuki Hagiwara¹, Naoto Kameda¹, Toshinori Miura¹, Yoshiki Morikawa¹, Mitsuru Kekura¹, Ryoji Kosugi², Ken Nakamura², Hidehiko Nonaka² (1.Meidensha Corp., 2.AIST)