Akira Shingu

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Speaker, Author, Co-Author

Thu. Sep 19, 2019 1:30 PM - 3:30 PM PB3 (PB)

Poster presentation
| 13 Semiconductors
| 13.7 Compound and power electron devices and process technology

[19p-PB3-1~24] 13.7 Compound and power electron devices and process technology

1:30 PM - 3:30 PM

[19p-PB3-4] Mechanism of plasma etching damages in GaN

〇Akira Shingu¹, Masamichi Annen¹, Seiji Nakamura¹ (1.Tokyo Metropolitan Univ.)