Taiki Kawamoto

→ Search for Taiki Kawamoto in Google Scholar

Speaker, Author, Co-Author

Fri. Sep 20, 2019 9:00 AM - 12:30 PM C309 (C309)

Oral presentation
| 6 Thin Films and Surfaces
| 6.1 Ferroelectric thin films

[20a-C309-1~13] 6.1 Ferroelectric thin films

9:30 AM - 9:45 AM

△ [20a-C309-3] Characteristics of the Hf_0.5Zr_0.5O₂ Thin Films Grown by a Facing Target Sputtering Method

〇(M2)Taiki Kawamoto¹, Hiroshi Ota¹, Yuichi Hirofuji¹, Kazuto Koike¹, Mitsuaki Yano¹, Sadao Kazukura², Yutaka Nakamitsu³ (1.Osaka Inst.of Tech.,NMRC, 2.FTS Corporation, 3.ULVAC)