Moataz Eissa

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Speaker, Author, Co-Author

Fri. Sep 20, 2019 10:00 AM - 11:45 AM E215 (E215)

Oral presentation
| 4 JSAP-OSA Joint Symposia 2019
| 4.2 Photonics Devices, Photonic Integrated Circuit and Silicon Photonics

[20a-E215-1~6] 4.2 Photonics Devices, Photonic Integrated Circuit and Silicon Photonics

11:30 AM - 11:45 AM

▲ [20a-E215-6] Fabrication of Si Photonics Waveguides by Thick Resist-Mask Electron Beam Lithography Proximity Effect Correction

〇(D)Moataz Eissa¹, Takuya Mitarai¹, Tomohiro Amemiya^1,2, Nobuhiko Nishiyama^1,2, Yasuyuki Miyamoto^1,2 (1.Tokyo Tech., 2.FIRST Lab.)