Erika Maeda

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Speaker, Author, Co-Author

Fri. Sep 20, 2019 9:00 AM - 12:15 PM E301 (E301)

Oral presentation
| 13 Semiconductors
| 13.7 Compound and power electron devices and process technology

[20a-E301-1~12] 13.7 Compound and power electron devices and process technology

10:45 AM - 11:00 AM

[20a-E301-7] Influence of GaN/HfSiO_x interface on electrical properties for GaN/HfSiO_x/Pt capacitors

〇Erika Maeda^1,2, Toshihide Nabatame², Masafumi Hirose^1,2, Mari Inoue², Akihiko Ohi², Naoki Ikeda², Koji Shiozaki³, Hajime Kiyono¹ (1.SIT, 2.NIMS, 3.NU)