Kentaro Miyata

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Speaker, Author, Co-Author

Fri. Sep 20, 2019 3:30 PM - 7:00 PM E203 (E203)

Oral presentation
| 3 Optics and Photonics
| 3.5 Laser system and materials

[20p-E203-7~19] 3.5 Laser system and materials

5:45 PM - 6:00 PM

[20p-E203-15] Power Scaling of Tunable Picosecond DUV Laser for Semiconductor Inspection

〇Kentaro Miyata¹, Akihiro Tanabashi¹, Mizuki Mohara², Kei Shimura², Shinichi Nakayama³, Satoshi Wada¹ (1.RIKEN, 2.Hitachi High-Tech, 3.Megaopto)