Yusuke Samata

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Speaker, Author, Co-Author

Fri. Sep 20, 2019 1:30 PM - 6:15 PM E311 (E311)

Oral presentation
| 15 Crystal Engineering
| 15.6 Group IV Compound Semiconductors (SiC)

[20p-E311-1~17] 15.6 Group IV Compound Semiconductors (SiC)

2:30 PM - 2:45 PM

[20p-E311-5] Nitrogen atom desorption process during Ar annealing from 4H-SiC MOS interface on various crystal faces

〇(M1)Yusuke Samata¹, Koji Kita¹ (1.The Univ. of Tokyo)