Takuya Ishihara

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Speaker, Author, Co-Author

Fri. Sep 20, 2019 1:15 PM - 5:45 PM E313 (E313)

Oral presentation
| 1 Interdisciplinary Physics and Related Areas of Science and Technology
| 1.5 Instrumentation, measurement and Metrology

[20p-E313-1~17] 1.5 Instrumentation, measurement and Metrology

2:30 PM - 2:45 PM

[20p-E313-6] Analysis and structural optimization of capacitance manometer for semiconductor manufacturing by direct simulation Monte Carlo method

〇Takuya Ishihara¹, Masaru Soeda¹, Masashi Sekine¹, Yusuke Niimura¹ (1.Azbil Corp.)