Akiko Hirata

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Speaker, Author, Co-Author

Fri. Sep 20, 2019 1:30 PM - 5:45 PM N304 (N304)

Symposium (Oral)
| Symposium (technical)
| Latest trend on atomic layer processes

[20p-N304-1~10] Latest trend on atomic layer processes

5:30 PM - 5:45 PM

△ [20p-N304-10] Analysis of SiN Surface Fluctuations in Atomic Layer Etching

〇Akiko Hirata¹, Masanaga Fukasawa¹, Katsuhisa Kugimiya¹, Kohjiro Nagaoka¹, Kazuhiro Karahashi², Satoshi Hamaguchi² (1.Sony Semiconductor Solutions Corp., 2.Osaka Univ.)

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