Kota Uematsu

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Speaker, Author, Co-Author

Fri. Sep 20, 2019 1:30 PM - 5:45 PM N304 (N304)

Symposium (Oral)
| Symposium (technical)
| Latest trend on atomic layer processes

[20p-N304-1~10] Latest trend on atomic layer processes

4:15 PM - 4:30 PM

[20p-N304-6] Atomic Layer Etching of Ni by Ar-GCIB irradiation on acac adsorbed surface

〇(M1)Kota Uematsu¹, Noriaki Toyoda¹ (1.Univ. of Hyogo)