4:30 PM - 4:45 PM
△ [20p-N304-7] Dependence of chlorine adsorption layer on ion energy on Ar ion-irradiated GaN surface
〇Masaki Hasegawa1, Takayoshi Tsutsumi2, Hiroki Kondo2, Makoto Sekine2, Kenji Ishikawa2, Masaru Hori2 (1.Nagoya Univ., 2.Center for Low-temperature Plasma Sciences, Nagoya Univ.)