Masaru Izawa

→ Search for Masaru Izawa in Google Scholar

Speaker, Author, Co-Author

Fri. Sep 20, 2019 1:30 PM - 5:45 PM N304 (N304)

Symposium (Oral)
| Symposium (technical)
| Latest trend on atomic layer processes

[20p-N304-1~10] Latest trend on atomic layer processes

4:45 PM - 5:15 PM

[20p-N304-8] Study on High Selective Conformal ALE by Surface Reaction Control

〇Masaru Izawa¹ (1.Hitachi High-Tech)