Masashi Seki

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Speaker, Author, Co-Author

Fri. Sep 20, 2019 1:30 PM - 3:30 PM PB1 (PB)

Poster presentation
| 6 Thin Films and Surfaces
| 6.5 Surface Physics, Vacuum

[20p-PB1-1~13] 6.5 Surface Physics, Vacuum

1:30 PM - 3:30 PM

[20p-PB1-12] Influence of etching on the metal and organic film by Ar ion and Ar gas cluster ion beam

〇Masashi Seki¹, Kazuki Nakamura², Sayaka Yamamoto², Hiromi Tanaka² (1.Toshiba TEC Corp., 2.Yonago College)