Masachika Toguchi

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Speaker, Author, Co-Author

Sat. Sep 21, 2019 9:00 AM - 12:30 PM E301 (E301)

Oral presentation
| 13 Semiconductors
| 13.7 Compound and power electron devices and process technology

[21a-E301-1~13] 13.7 Compound and power electron devices and process technology

9:30 AM - 9:45 AM

△ [21a-E301-3] Contactless Photoelectrochemical Etching of n-GaN in K₂S₂O₈/H₃PO₄ Mixed Solution

〇(D)Masachika Toguchi¹, Kazuki Miwa¹, Fumimasa Horikiri², Noboru Fukuhara², Yoshinobu Narita², Takehiro Yoshida², Taketomo Sato¹ (1.RCIQE Hokkaido Univ., 2.SCIOCS Co. Ltd.)