[21a-E319-1~5] 6.5 Surface Physics, Vacuum

9:45 AM - 10:00 AM

[21a-E319-4] Development of Nonevaporable Getter Coating Using Oxygen Free Pd/Ti, Electron Microscopic Observation, and Surface Analysis by Synchrotron Radiation X-Ray Photoelectron Spectroscopy

Tetsuya Miyazawa¹, Masashi Kurihara², Shinya Ohno², Misao Yamanaka³, Ayako Hashimoto^3,4, Yu Kano⁵, Yasuo Nakayama⁵, Kenichi Ozawa⁶, Takashi Kikuchi⁷, 〇Kazuhiko Mase^7,1 (1.SOKENDAI, 2.Yokohama Nat'l Univ., 3.NIMS, 4.Univ. of Tsukuba, 5.Tokyo Univ. of Science, 6.Tokyo Tech, 7.KEK)