Ploybussara Gomasang

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Speaker, Author, Co-Author

Sat. Sep 21, 2019 9:30 AM - 11:30 AM PB1 (PB)

Poster presentation
| 17 Nanocarbon Technology
| 17 Nanocarbon Technology (Poster)

[21a-PB1-1~86] 17 Nanocarbon Technology (Poster)

9:30 AM - 11:30 AM

▲ [21a-PB1-25] Amorphous-Carbon Barrier against Moisture for Cu Metallization

〇(D)Ploybussara Gomasang¹, Kazuyoshi Ueno^1,2 (1.Shibaura Inst. of Tech., 2.SIT RCGI)