Kazuyuki Uno

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Speaker, Author, Co-Author

Sat. Sep 21, 2019 12:45 PM - 4:30 PM B31 (B31)

Oral presentation
| Joint Session K
| 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

[21p-B31-1~14] 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

12:45 PM - 1:00 PM

[21p-B31-1] Growth of alpha-Ga₂O₃ thin films using choride-based dilute gallium source solutions by mist chemical vapor deposition (II)

〇Kazuyuki Uno¹, Kazutoshi Matsumoto¹, Ichiro Tanaka¹ (1.Systems Eng., Wakayama Univ.)