Fukushima Takafumi

→ Search for Fukushima Takafumi in Google Scholar

Chairperson, etc.

Thu. Sep 19, 2019 9:00 AM - 12:00 PM E304 (E304)

Oral presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[19a-E304-1~12] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

Reo Kometani(Univ. of Tokyo), Fukushima Takafumi(Tohoku University)