〇Michio Tajima^1,2,3, Shuichi Samata^1,4, Satoko Nakagawa^1,5, Jun Oriyama¹, Noriyuki Ishihara^1,6 (1.JSNM, 2.ISAS/JAXA, 3.Meiji Univ., 4.SUMCO, 5.GWJ, 6.MIZUHO-IR)

〇AKIO OGURA¹, Tomoyuki Tanikawa², Tatsuya Takamoto³, Ryuji Oshima⁴, Takeyoshi Sugaya⁴, Mitsuru Imaizumi¹ (1.JAXA, 2.Osaka Univ., 3.SHARP Corp., 4.AIST)

〇Toshihiro Yoshizumi¹, Keigo Koshiba¹, Daiki Fujii¹, Satoru Kitsunai¹, Kosuke Igarashi¹, Teru Yoshizawa¹, Masamichi Sakai¹, Osamu Nakamura² (1.Saitama University, 2.Okayama University of Science)

〇Katsuto Tanahashi¹, Tomihisa Tachibana¹, Masaaki Moriya¹, Yasuhiro Kida¹, Satoshi Utsunomiya¹, Katsuhiko Shirasawa¹, Hidetaka Takato¹ (1.AIST)

〇Satoshi Shigematsu¹, Ryosuke Okuyama¹, Ryo Hirose¹, Ayumi Masada¹, Takeshi Kadono¹, Koji Kobayashi¹, Akihiro Suzuki¹, Yoshihiro Koga¹, Kazunari Kurita¹ (1.SUMCO)

〇Hiroki Nagakura^1,2, Koji Sueoka³ (1.Sony Semiconductor Manufacturing, 2.Graduate School of Okayama Pref. Univ., 3.Okayama Pref. Univ.)