Oral presentation

[20a-E307-1~6] 7.3 Micro/Nano patterning and fabrication

Fri. Sep 20, 2019 10:00 AM - 11:45 AM E307 (E307)

Jiro Yamamoto(Hitachi), Jun Taniguchi(Tokyo Univ. of Sci.)

△：Presentation by Applicant for JSAP Young Scientists Presentation Award
▲：English Presentation
▼：Both of Above
No Mark：None of Above

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10:00 AM - 10:15 AM

[20a-E307-1] Role of Metal Sensitizers for Sensitivity Improvement in EUV Chemically Amplifed Resist

〇Hiroki Yamamoto¹, Yannick Vesters^2,3, Jing Jiang², Danilo de Simone², Geert Vandenberghe², Takahiro Kozawa⁴ (1.QST, 2.IMEC, 3.KU Leuven, 4.ISIR, Osaka univ.)

10:15 AM - 10:30 AM

[20a-E307-2] Improvement of Sensitivity of Chemically Amplified Resists upon Adding Diphenyl Sulfone Derivatives

〇(M2)Shunpei Kawai¹, Kazumasa Okamoto², Masato Ohnuma¹, Takahiro Kozawa² (1.Hokkaido Univ., 2.Osaka Univ.)

10:30 AM - 10:45 AM

▲ [20a-E307-3] Improvement of Line-Edge Roughness on Pt-based Ultrafine Nanorods by Post-Exposure Bake

〇JAEYEON KIM¹, Ryo Toyama¹, Yutaka Majima¹ (1.Tokyo Institute of Technology)

11:00 AM - 11:15 AM

[20a-E307-4] Hydrophobicity Improvement of Stainless-Steel Plates by Forming Lens-Like Protrusions

〇Toshiyuki Horiuchi¹, Yoshie Imon¹, Kazuya Sumimoto¹, Akira Yanagida¹, Hiroshi Kobayashi¹ (1.Tokyo Denki Univ.)

11:15 AM - 11:30 AM

[20a-E307-5] Fabrication of self-standing PS film with small through holes by casting process.

〇Hiroaki Kawata¹, Shingo Shimizu¹, Masaaki Yasuda¹, Yoshihiko Hirai¹ (1.Osaka Pref. Univ.)

11:30 AM - 11:45 AM

△ [20a-E307-6] Morphology control of atomic- and nano-scale periodic patterns transcribed on polymer sheet by thermal annealing and excimer light irradiation

〇(B)Naho Kaneko¹, Tomoaki Oga¹, Atsushi Oshima¹, Satoru Kaneko^2,1, Akifumi Matsuda¹, Mamoru Yoshimoto¹ (1.Tokyo Tech. Materials, 2.KISTEC)

Sessions

7 Beam Technology and Nanofabrication » 7.3 Micro/Nano patterning and fabrication