The 80th JSAP Autumn Meeting 2019

Presentation information

Print

Oral presentation

15 Crystal Engineering » 15.7 Crystal characterization, impurities and crystal defects

[18a-C212-1~11] 15.7 Crystal characterization, impurities and crystal defects

Wed. Sep 18, 2019 9:00 AM - 12:00 PM C212 (C212)

Naoki Fukata(NIMS), Kazuhisa Torigoe(SUMCO), Wataru Sugimura(SUMCO Corporation)

11:45 AM - 12:00 PM

[18a-C212-11] Impact of heating rate during the melting process for poly-silicon on carbon concentration in Czochralski silicon crystals

〇Kazuma Takahashi1, Hiroyuki Tsubota1, Yuta Nagai1, Yoshiaki Abe1, Hisashi Matsumura1 (1.GlobalWafers Japan)

Keywords:crystal growth, silicon, carbon concentration