[18a-E205-1~9] 3.2 Equipment optics and materials

[18a-E205-4] Bending Technique of Planar Device for Manufacturing Curved Device
Having Wavelength-Subwavelength StructureⅢ
- Bending of Non-uniform Pitch Grooves Planar Diffraction Grating -

〇Kenta Yaegashi¹, Yoshisada Ebata¹, Shigeru Matsui¹, Isao Uchida², Takanori Aono² (1.Hitachi High-Tech, 2.Hitachi R&D)

Keywords:diffraction grating, concave diffraction grating

In this presentation, we will report the fabrication of non-uniform pitch grooves planar diffraction grating using photolithography technique and the results of the optical characteristics of concave diffraction grating made by bending non-uniform pitch grooves planar diffraction grating.