[18a-E207-1~10] 15.1 Bulk crystal growth

[18a-E207-8] Preparation and characterization of Iridium films by the thermal CVD method on metal substrates

〇Hiroki Sato^1,2,3, Takashi Goto¹, Yuui Yokota¹, Masao Yoshino⁴, Akihiro Yamaji⁴, Satoshi Toyoda¹, Yuji Ohashi¹, Shunsuke Kurosawa¹, Kei Kamada¹, Atsushi Okuno^2,3, Akira Yoshikawa^1,4 (1.NICHe, Tohoku Univ., 2.SANKO Co., Ltd., 3.TUP Inc., 4.IMR, Tohoku Univ.)

Keywords:thermal CVD, iridium film, crucible

CVD of iridium (Ir) is of interest to prepare oxidation protective coatings on high-melting-temperature metals such as molybdenum (Mo). Thick enough coatings are essential to offer an effective corrosion and oxidation protection. By optimizing the temperature of raw materials, chamber pressure and the temperature of the metal substrates, Ir-Mo alloys were successfully obtained. The result of the SEM-EDX analysis and the XRD measurement will be discussed.