The 80th JSAP Autumn Meeting 2019

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Oral presentation

13 Semiconductors » 13.1 Fundamental properties, surface and interface, and simulations of Si related materials

[18a-E303-1~12] 13.1 Fundamental properties, surface and interface, and simulations of Si related materials

Wed. Sep 18, 2019 9:00 AM - 12:15 PM E303 (E303)

Koichiro Saga(Sony), Takashi Hasunuma(Univ. of Tsukuba)

11:30 AM - 11:45 AM

△ [18a-E303-10] A study on non-uniform interface state imaging of SiO2/Si using scanning nonlinear dielectric microscopy

〇(B)Koharu Suzuki1, Yamasue Kohei1, Cho Yasuo1 (1.Tohoku Univ.)

Keywords:Scanning Nonlinear Dielectric Microscopy, Interface, Silicon