[18a-E303-1~12] 13.1 Fundamental properties, surface and interface, and simulations of Si related materials

[18a-E303-7] Evaluation of metal contamination in SiO2 by Pulse Photoconductivity Method

〇Hiroki Obana¹, Narumi Abe¹, Yuki Kumagae¹, Takuma Yamashita¹, Ryo Ogasawara², Tatsuki Hamada², Ryo Yoshii², Hiroshi Kubota¹, Takeshi Hashishin¹, Masao Yoshioka² (1.GSST Kumamoto Univ., 2.Kumamoto Univ.)

Keywords:Pulse Photoconductivity Method