[18a-E311-1~9] 6.3 Oxide electronics

[18a-E311-6] Fabrication and investigation of the electronic properties of perovskite-type oxyfluoride SrCrO_3-xF_x thin films

〇Akira Chikamatsu¹, Takahiro Maruyama¹, Tsukasa Katayama¹, Yu Su², Yoshihiro Tsujimoto^2,3, Kazunari Yamaura^2,3, Miho Kitamura⁴, Koji Horiba⁴, Hiroshi Kumigashira^4,5, Tetsuya Hasegawa¹ (1.Univ. of Tokyo, 2.NIMS, 3.Hokkaido Univ., 4.KEK-PF, 5.Tohoku Univ.)

Keywords:Mixed-anion oxide thin film, Chromium oxide