[18a-F211-1~8] 8.3 Plasma nanotechnology

[18a-F211-4] Spatio-temporal Information Analysis of Fluctuation of Growth of Nanoparticles in Amplitude Modulated Reactive Plasma

〇KUNIHIRO KAMATAKI¹, Hayate Tanaka¹, Daisuke Yamashita¹, Naho Itagaki¹, Kazunori Koga¹, Masaharu Shiratani¹ (1.Kyushu Univ.)

Keywords:reactive plasma, fluctuation analysis, growth of nanoparticle