[18a-PA6-1~12] 8.1 Plasma production and diagnostics

[18a-PA6-1] Temporal Variation of Surface Potential on Insulated Film During DC Pulse Voltage Application to an Antenna of Surface-wave Plasma

〇Sho Fukuda¹, Haruka Suzuki¹, Yuya Murata², Kenji Yamamoto², Hirotaka Toyoda¹ (1.Nagoya Univ., 2.Kobe Steel Ltd.)

Keywords:Plasma