Oral presentation

[20a-B11-1~10] 8.1 Plasma production and diagnostics

Fri. Sep 20, 2019 9:00 AM - 11:45 AM B11 (B11)

△：Presentation by Applicant for JSAP Young Scientists Presentation Award
▲：English Presentation
▼：Both of Above
No Mark：None of Above

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9:00 AM - 9:15 AM

[20a-B11-1] Radial Dependence of Rotational Temperature of N₂ and N₂⁺ in Nitrogen Plasma

June Konami¹, Atsushi Nezu², 〇Hiroshi Akatsuka³ (1.Tokyo Tech. Trans., 2.Tokyo Tech., 3.Tokyo Tech. IIR)

9:15 AM - 9:30 AM

△ [20a-B11-2] The excited-state distribution analysis of the low-pressure microwave discharge argon plasma for electron energy distribution function diagnosis by optical emission spectroscopic measurement

〇Yuya Yamashita¹, Hiroshi Akatsuka² (1.TIRI, 2.Tokyo Tech)

9:30 AM - 9:45 AM

[20a-B11-3] Measurements of electron velocity distribution function of streamer discharges produced in the air using Thomson scattering

〇Kentarou Tomita¹, Kiichiro Uchino¹, Yuki Inada², Atsushi Komuro³, Xiang Zhang⁴, Ryo Ono⁴ (1.Ksyuhu Univ., 2.Saitama Univ., 3.Tohoku Univ., 4.Univ. Tokyo)

9:45 AM - 10:00 AM

△ [20a-B11-4] Electric field measurement in plasma by laser absorption spectroscopy at Balmer-alpha line of atomic hydrogen

〇Kosuke Takada¹, Syusuke Nishiyama¹, Koiti Sasaki¹ (1.Hokudai Univ.)

10:00 AM - 10:15 AM

△ [20a-B11-5] Detection of OH radicals by evanescent-wave laser induced fluorescence in the vicinity of a quartz surface interaction with an atmospheric-pressure plasma

〇Yuto Hishida¹, Koichi Sasaki¹ (1.Hokkaido Univ.)

10:30 AM - 10:45 AM

[20a-B11-6] Pulse and power controls in modulated pulsed power magnetron sputtering and the optical emission spectroscopy

〇(M1)Yuki Nakagomi¹, Tatsuya Watabe¹, Mutsuki Hirayama¹, Ryosuke Kaneyuki¹, Nobuo Nishimiya¹, Masaomi Sanekata¹, Hiroaki Yamamoto², Masahide Tona², Keizo Tsukamoto², Keijiro Ohshimo³, Fuminori Misaizu³ (1.Tokyo Polytechinic Univ., 2.Ayabo Corp, 3.Tohoku Univ.)

10:45 AM - 11:00 AM

[20a-B11-7] Spatially resolved measurement of bremsstrahlung spectrum in a pure helium atmospheric pressure glow discharge

〇Motonao Nagasaki¹, Taiichi Shikama¹, Yohei Ueno¹, Masahiro Hasuo¹ (1.Kyoto univ.)

11:00 AM - 11:15 AM

△ [20a-B11-8] [Highlight] Time- and space-resolved observation of solvated electrons dynamics in femtosecond laser-induced plasma reaction field in liquid

〇Noritaka Sakakibara^1,2,3, Tsuyohito Ito¹, Kazuo Terashima^1,2, Yukiya Hakuta², Eisuke Miura² (1.The Univ. of Tokyo, 2.AIST, 3.JSPS Research Fellow)

11:15 AM - 11:30 AM

△ [20a-B11-9] Vacuum Ultraviolet Absorption Spectroscopy of Hydrogen Plasma Using a Self-Absorbing Micro-Discharge Hollow Cathode Light Source

〇Sho Shimizu¹, Keigo Takeda¹, Takayoshi Tsutsumi², Mineo Hiramatsu¹, Masaru Hori² (1.Meijo University, 2.Nagoya University)

11:30 AM - 11:45 AM

[20a-B11-10] Density-Correlation between Metastables and Electrons in Low-Temperature Plasmas in Ar

〇Toshiaki Makabe¹ (1.Keio Univ.)

Oral presentation

[20p-B11-1~12] 8.1 Plasma production and diagnostics

Fri. Sep 20, 2019 1:15 PM - 5:15 PM B11 (B11)

Shusuke Nishiyama(Hokkaido Univ.), Mineo Hiramatsu(Meijo Univ.)

△：Presentation by Applicant for JSAP Young Scientists Presentation Award
▲：English Presentation
▼：Both of Above
No Mark：None of Above

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1:15 PM - 2:00 PM

▲ [20p-B11-1] 【講演中止/CANCELED】[Fellow International 2019 Special Lecture] Fundamental Physics for Plasma Technology

〇Uwe Reinhard Czarnetzki¹ (1.Ruhr Univ. Bochum)

2:15 PM - 2:30 PM

▼ [20p-B11-2] Time-resolved Measurement of Pulsed-microwave Excited Atmospheric-pressure Long-scale Slot Plasma

〇(M1C)ManhHung Chu¹, Haruka Suzuki¹, Hirotaka Toyoda¹ (1.Nagoya Univ.)

2:30 PM - 2:45 PM

[20p-B11-3] Measurement of negative ions using retarding field energy analyzer with magnetic filter

〇Yoshinobu Matsuda¹, Masaki Ishiba¹, Shu Yasumoto¹, Tomohiro Furusato¹, Takahiko Yamashita¹ (1.Nagasaki Univ.)

2:45 PM - 3:00 PM

[20p-B11-4] Possibility of In-situ Measurements of Double Curling Probes for Material Processing

〇DAISUKE OGAWA¹, Keiji NAKAMURA¹, Hideo SUGAI¹ (1.Chubu University)

3:00 PM - 3:15 PM

△ [20p-B11-5] Development and assesment of rotational maze shaped RF magnetron sputtering system for improving target utilization

〇Rei Tanaka¹, Yasunori Ohtsu¹, Takahiro Nakashima¹ (1.Saga Univ.)

3:15 PM - 3:30 PM

△ [20p-B11-6] Production and optical emission spectroscopy ofradio frequency hollow cathode discharge plasmausing Ar/O₂ mixed gas for high-speed ashing of polyimide film

〇Shinnosuke Honda¹, Yasunori Ohtsu¹, Yuta Ino¹, Yuto Fukunaga¹ (1.Saga Univ.)

3:30 PM - 3:45 PM

△ [20p-B11-7] Development of RF magnetron sputtering source for synthesis of water repellent thin film on the next-generation vehicle window

〇Yuta Ino¹, Yasunori Ohtsu¹, Koya Yasuda¹ (1.Saga Univ.)

4:00 PM - 4:15 PM

△ [20p-B11-8] Temporal change in surface tension at gas-liquid interface induced by spatial afterglow of an atmospheric-pressure plasma

〇(M2)Takuma Kaneko¹, Shirai Naoki¹, Sasaki Koichi¹ (1.Hokkaido Univ.)

4:15 PM - 4:30 PM

[20p-B11-9] Simulation of Plasma Generation by Resonant-Cavity Microwave Discharge

〇LIZHU TONG¹ (1.Keisoku Eng. Sys.)

4:30 PM - 4:45 PM

[20p-B11-10] Time Evolution of Discharge Profiles and Spatial Distribution of Hydrogen Radical Density in the Nonequilibrium Atmospheric Pressure Ar Plasma

Kaede Katsuno¹, 〇Takayoshi Tsutsumi¹, Kenji Ishikawa¹, Keigo Takeda², Hiroshi Hashizume¹, Hiromasa Tanaka¹, Hiroki Kondo¹, Makoto Sekine¹, Masaru Hori¹ (1.Nagoya Univ., 2.Meijo Univ.)

4:45 PM - 5:00 PM

[20p-B11-11] Plasma-Bullet Propagation Through a Glass Plate

〇Tatsuru Shirafuji¹, Jun-Seok Oh¹, Ryo Matoba¹, Yuki Hamamoto¹, Ryo Sugama¹, Kumi Orita¹, Hiromitsu Toyoda¹ (1.Osaka City Univ.)

5:00 PM - 5:15 PM

[20p-B11-12] Comparison of radical densities in helium and nitrogen plasma jets for suppression of potato sprout

〇Katsunori Ueno¹, Shusuke Nishiyama¹, Koichi Sasaki¹ (1.Hokkaido Univ.)

Poster presentation

[18a-PA6-1~12] 8.1 Plasma production and diagnostics

Wed. Sep 18, 2019 9:30 AM - 11:30 AM PA6 (PA)

△：Presentation by Applicant for JSAP Young Scientists Presentation Award
▲：English Presentation
▼：Both of Above
No Mark：None of Above

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9:30 AM - 11:30 AM

[18a-PA6-1] Temporal Variation of Surface Potential on Insulated Film During DC Pulse Voltage Application to an Antenna of Surface-wave Plasma

〇Sho Fukuda¹, Haruka Suzuki¹, Yuya Murata², Kenji Yamamoto², Hirotaka Toyoda¹ (1.Nagoya Univ., 2.Kobe Steel Ltd.)

9:30 AM - 11:30 AM

[18a-PA6-2] Verification of AlN⁺ production by a plasma sputter type ion source

〇Takeshi Sakamoto¹, Kasuya Toshiro¹, Wada Motoi¹ (1.Doshisha Univ.)

9:30 AM - 11:30 AM

[18a-PA6-3] Resolution improvement of Wien filter for desktop-sized ECR ion source

〇Hiroya Uyama¹, Toyohisa Asaji¹, Tsubasa Nakamura², Takeshi Hitobo³, Yushi Kato⁴ (1.NIT, Toyama Coll., 2.NIT, Oshima Coll., 3.Tateyama Machine Co.,, 4.Osaka Univ.)

9:30 AM - 11:30 AM

[18a-PA6-4] Mass Spectrometric Study on Incident Ions on Electrode in Low-Pressure RF Tetramethylsilane Plasmas with Different Dilution Gases

〇Shun Suzuki¹, Shin Ogawa¹, Koichi Ishii¹, Akinori Oda¹, Takayuki Ohta², Hiroyuki Kousaka³, Yasuaki Watanabe⁴ (1.Chiba Tech, 2.Meijo Univ., 3.Gifu Univ., 4.Innovation Science Inc.)

9:30 AM - 11:30 AM

[18a-PA6-5] Space-resolved cross-sectional observation of slot-excited microwave O₂/Ar plasma at atmospheric pressure

〇Yoshiki Baba¹, Haruka Suzuki¹, Hirotaka Toyoda¹ (1.Nagoya Univ.)

9:30 AM - 11:30 AM

▲ [18a-PA6-6] Optical observation of He₂^* excimers in He/N₂ cryoplasma

〇YuYu Phua¹, Noritaka Sakakibara^1,2, Takeru Koike¹, Sung-Jin Park^1,3, Tsuyohito Ito¹, Kazuo Terashima¹ (1.The Univ. of Tokyo, 2.JSPS Research Fellow, 3.Univ. of Illinois)

9:30 AM - 11:30 AM

[18a-PA6-7] Electromagnetic field distribution in a long-scale slot plasma using traveling waves

〇Hirotsugu Koma¹, Haruka Suzuki^1,2, Hirotaka Toyoda^1,2 (1.Nagoya Univ., 2.cLPS, Nagoya Univ.)

9:30 AM - 11:30 AM

[18a-PA6-8] Operation Characteristics of Plasma Cathode for Sheet Plasma Production Using Lanthanum Tungsten Hot Cathode

〇(M1)Yoshiyuki Matsui¹, Toshiro Kasuya¹, Motoi Wada¹ (1.Doshisha Univ.)

9:30 AM - 11:30 AM

[18a-PA6-9] Measurement of ion energy distribution with Faraday cup in dual frequency capacitively-coupled plasma

〇Akihiro Mitsuya¹, Makoto Moriyama¹, Naoya Nakahara¹, Haruka Suzuki¹, Hirotaka Toyoda¹ (1.Nagoya Univ.)

9:30 AM - 11:30 AM

[18a-PA6-10] Emission of H^- Ions from C₁₂A₇ Electride Surface Immersed in Hydrogen Plasma

〇Motoi Wada¹, Takayuki Eguchi¹, Mamiko Sasao², Masashi Kisaki³, Haruhisa Nakano³, Katsuyoshi Tsumori³ (1.Sci. Eng. Doshisha, 2.R&D Doshisha, 3.NIFS)

9:30 AM - 11:30 AM

[18a-PA6-11] Molecular structure analysis on surface of glucose film using sum frequency generation spectroscopy

〇Yuta Yoshida¹, Ryoya Katsuya¹, Takayuki Ohta¹, Kenji Ishikawa², Masaru Hori² (1.Meijo Univ, 2.Nagoya Univ)

9:30 AM - 11:30 AM

[18a-PA6-12] Measurement of ion flux and plasma density by tone burst floating probe method

〇Takeshi Katahira¹, Mikio Ohuchi¹, Shuichi Sato¹ (1.Tokyo Denki Univ.)

Sessions

8 Plasma Electronics » 8.1 Plasma production and diagnostics

[20a-B11-1~10] 8.1 Plasma production and diagnostics

[20a-B11-1] Radial Dependence of Rotational Temperature of N₂ and N₂⁺ in Nitrogen Plasma

△ [20a-B11-2] The excited-state distribution analysis of the low-pressure microwave discharge argon plasma for electron energy distribution function diagnosis by optical emission spectroscopic measurement

[20a-B11-3] Measurements of electron velocity distribution function of streamer discharges produced in the air using Thomson scattering

△ [20a-B11-4] Electric field measurement in plasma by laser absorption spectroscopy at Balmer-alpha line of atomic hydrogen

△ [20a-B11-5] Detection of OH radicals by evanescent-wave laser induced fluorescence in the vicinity of a quartz surface interaction with an atmospheric-pressure plasma

[20a-B11-6] Pulse and power controls in modulated pulsed power magnetron sputtering and the optical emission spectroscopy

[20a-B11-7] Spatially resolved measurement of bremsstrahlung spectrum in a pure helium atmospheric pressure glow discharge

△ [20a-B11-8] [Highlight] Time- and space-resolved observation of solvated electrons dynamics in femtosecond laser-induced plasma reaction field in liquid

△ [20a-B11-9] Vacuum Ultraviolet Absorption Spectroscopy of Hydrogen Plasma Using a Self-Absorbing Micro-Discharge Hollow Cathode Light Source

[20a-B11-10] Density-Correlation between Metastables and Electrons in Low-Temperature Plasmas in Ar

[20p-B11-1~12] 8.1 Plasma production and diagnostics

▲ [20p-B11-1] 【講演中止/CANCELED】[Fellow International 2019 Special Lecture] Fundamental Physics for Plasma Technology

▼ [20p-B11-2] Time-resolved Measurement of Pulsed-microwave Excited Atmospheric-pressure Long-scale Slot Plasma

[20p-B11-3] Measurement of negative ions using retarding field energy analyzer with magnetic filter

[20p-B11-4] Possibility of In-situ Measurements of Double Curling Probes for Material Processing

△ [20p-B11-5] Development and assesment of rotational maze shaped RF magnetron sputtering system for improving target utilization

△ [20p-B11-6] Production and optical emission spectroscopy ofradio frequency hollow cathode discharge plasmausing Ar/O₂ mixed gas for high-speed ashing of polyimide film

△ [20p-B11-7] Development of RF magnetron sputtering source for synthesis of water repellent thin film on the next-generation vehicle window

△ [20p-B11-8] Temporal change in surface tension at gas-liquid interface induced by spatial afterglow of an atmospheric-pressure plasma

[20p-B11-9] Simulation of Plasma Generation by Resonant-Cavity Microwave Discharge

[20p-B11-10] Time Evolution of Discharge Profiles and Spatial Distribution of Hydrogen Radical Density in the Nonequilibrium Atmospheric Pressure Ar Plasma

[20p-B11-11] Plasma-Bullet Propagation Through a Glass Plate

[20p-B11-12] Comparison of radical densities in helium and nitrogen plasma jets for suppression of potato sprout

[18a-PA6-1~12] 8.1 Plasma production and diagnostics

[18a-PA6-1] Temporal Variation of Surface Potential on Insulated Film During DC Pulse Voltage Application to an Antenna of Surface-wave Plasma

[18a-PA6-2] Verification of AlN⁺ production by a plasma sputter type ion source

[18a-PA6-3] Resolution improvement of Wien filter for desktop-sized ECR ion source

[18a-PA6-4] Mass Spectrometric Study on Incident Ions on Electrode in Low-Pressure RF Tetramethylsilane Plasmas with Different Dilution Gases

[18a-PA6-5] Space-resolved cross-sectional observation of slot-excited microwave O₂/Ar plasma at atmospheric pressure

▲ [18a-PA6-6] Optical observation of He₂^* excimers in He/N₂ cryoplasma

[18a-PA6-7] Electromagnetic field distribution in a long-scale slot plasma using traveling waves

[18a-PA6-8] Operation Characteristics of Plasma Cathode for Sheet Plasma Production Using Lanthanum Tungsten Hot Cathode

[18a-PA6-9] Measurement of ion energy distribution with Faraday cup in dual frequency capacitively-coupled plasma

[18a-PA6-10] Emission of H^- Ions from C₁₂A₇ Electride Surface Immersed in Hydrogen Plasma

[18a-PA6-11] Molecular structure analysis on surface of glucose film using sum frequency generation spectroscopy

[18a-PA6-12] Measurement of ion flux and plasma density by tone burst floating probe method

Authentication

Sessions

8 Plasma Electronics » 8.1 Plasma production and diagnostics

[20a-B11-1~10] 8.1 Plasma production and diagnostics

△ [20a-B11-2] The excited-state distribution analysis of the low-pressure microwave discharge argon plasma for electron energy distribution function diagnosis by optical emission spectroscopic measurement

△ [20a-B11-4] Electric field measurement in plasma by laser absorption spectroscopy at Balmer-alpha line of atomic hydrogen

△ [20a-B11-5] Detection of OH radicals by evanescent-wave laser induced fluorescence in the vicinity of a quartz surface interaction with an atmospheric-pressure plasma

△ [20a-B11-8] [Highlight] Time- and space-resolved observation of solvated electrons dynamics in femtosecond laser-induced plasma reaction field in liquid

△ [20a-B11-9] Vacuum Ultraviolet Absorption Spectroscopy of Hydrogen Plasma Using a Self-Absorbing Micro-Discharge Hollow Cathode Light Source

[20p-B11-1~12] 8.1 Plasma production and diagnostics

▲ [20p-B11-1] 【講演中止/CANCELED】[Fellow International 2019 Special Lecture] Fundamental Physics for Plasma Technology

▼ [20p-B11-2] Time-resolved Measurement of Pulsed-microwave Excited Atmospheric-pressure Long-scale Slot Plasma

△ [20p-B11-5] Development and assesment of rotational maze shaped RF magnetron sputtering system for improving target utilization

△ [20p-B11-6] Production and optical emission spectroscopy ofradio frequency hollow cathode discharge plasmausing Ar/O2 mixed gas for high-speed ashing of polyimide film

△ [20p-B11-7] Development of RF magnetron sputtering source for synthesis of water repellent thin film on the next-generation vehicle window

△ [20p-B11-8] Temporal change in surface tension at gas-liquid interface induced by spatial afterglow of an atmospheric-pressure plasma

[18a-PA6-1~12] 8.1 Plasma production and diagnostics

▲ [18a-PA6-6] Optical observation of He2* excimers in He/N2 cryoplasma

Authentication

△ [20p-B11-6] Production and optical emission spectroscopy ofradio frequency hollow cathode discharge plasmausing Ar/O₂ mixed gas for high-speed ashing of polyimide film

▲ [18a-PA6-6] Optical observation of He₂^* excimers in He/N₂ cryoplasma