The 80th JSAP Autumn Meeting 2019

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Oral presentation

8 Plasma Electronics » 8.1 Plasma production and diagnostics

[20p-B11-1~12] 8.1 Plasma production and diagnostics

Fri. Sep 20, 2019 1:15 PM - 5:15 PM B11 (B11)

Shusuke Nishiyama(Hokkaido Univ.), Mineo Hiramatsu(Meijo Univ.)

3:30 PM - 3:45 PM

△ [20p-B11-7] Development of RF magnetron sputtering source for synthesis of water repellent thin film on the next-generation vehicle window

〇Yuta Ino1, Yasunori Ohtsu1, Koya Yasuda1 (1.Saga Univ.)

Keywords:sputtering, deposition, water-repellent