[20p-B11-1~12] 8.1 Plasma production and diagnostics

[20p-B11-9] Simulation of Plasma Generation by Resonant-Cavity Microwave Discharge

〇LIZHU TONG¹ (1.Keisoku Eng. Sys.)

Keywords:microwave plasma, resonant cavity, simulation

A microwave-induced plasma jet is a rocket that converts the energy of plasma generated by microwave discharge in a cavity into the propulsion energy. The microwave plasma produced in a cavity is also applied to material processing. In this study, we performed a simulation of microwave plasma produced in a cavity. Results show that the microwave is reflected by the plasma and a penetration zone is formed. The decrease of the electric field strength in the plasma region is presented and discussed.