The 80th JSAP Autumn Meeting 2019

Presentation information

Print

Oral presentation

8 Plasma Electronics » 8.1 Plasma production and diagnostics

[20p-B11-1~12] 8.1 Plasma production and diagnostics

Fri. Sep 20, 2019 1:15 PM - 5:15 PM B11 (B11)

Shusuke Nishiyama(Hokkaido Univ.), Mineo Hiramatsu(Meijo Univ.)

2:45 PM - 3:00 PM

[20p-B11-4] Possibility of In-situ Measurements of Double Curling Probes for Material Processing

〇DAISUKE OGAWA1, Keiji NAKAMURA1, Hideo SUGAI1 (1.Chubu University)

Keywords:Plasma Diagnostics, Film Thickness Measurement, In-situ measurement