3:00 PM - 3:15 PM
△ [20p-B11-5] Development and assesment of rotational maze shaped RF magnetron sputtering system for improving target utilization
Keywords:sputtering, deposition, target utilization
Presentation information
Oral presentation
8 Plasma Electronics » 8.1 Plasma production and diagnostics
[20p-B11-1~12] 8.1 Plasma production and diagnostics
Fri. Sep 20, 2019 1:15 PM - 5:15 PM B11 (B11)
Shusuke Nishiyama(Hokkaido Univ.), Mineo Hiramatsu(Meijo Univ.)