[20p-B11-1~12] 8.1 Plasma production and diagnostics

[20p-B11-3] Measurement of negative ions using retarding field energy analyzer with magnetic filter

〇Yoshinobu Matsuda¹, Masaki Ishiba¹, Shu Yasumoto¹, Tomohiro Furusato¹, Takahiko Yamashita¹ (1.Nagasaki Univ.)

Keywords:retarding field energy analyser, ion energy distribution, magnetron sputtering

In order to understand the substrate incident ion energy distribution in sputtering deposition of metal-doped ZnO target, we developed a multigrid reflection field energy analyzer (RFEA) with a magnetic filter and investigated its basic operating characteristics. In DC magnetron discharge, it was confirmed that high energy negative ions corresponding to the DC voltage applied to the target were incident on the substrate.