The 80th JSAP Autumn Meeting 2019

Presentation information

Print

Oral presentation

8 Plasma Electronics » 8.1 Plasma production and diagnostics

[20a-B11-1~10] 8.1 Plasma production and diagnostics

Fri. Sep 20, 2019 9:00 AM - 11:45 AM B11 (B11)

Yoshinobu Matsuda(Nagasaki Univ.)

11:30 AM - 11:45 AM

[20a-B11-10] Density-Correlation between Metastables and Electrons in Low-Temperature Plasmas in Ar

〇Toshiaki Makabe1 (1.Keio Univ.)

Keywords:Ar metastable density, Low-temperature, rf plasma sources in Ar, density-correlation between electrons and metastables

There exist large number of experimental and theoretical studies of neutral metastables in Ar. In the present work, we investigate a density-correlation between electrons and metastables in the normalized form, ne/Ng - N*/Ng for various kinds of low-temperature rf plasma sources. Here, Ng is the number density of feed gas Ar. A reasonable cross-correlation based on a simple rate equation is shown and discussed. Ref: T. Makabe, J.Phys.D 52 (2019) 213002 and 259601.