Measurement of ion energy distribution with Faraday cup in dual frequency capacitively-coupled plasma

Presentation information

Poster presentation

8 Plasma Electronics » 8.1 Plasma production and diagnostics

Wed. Sep 18, 2019 9:30 AM - 11:30 AM PA6 (PA)

9:30 AM - 11:30 AM

〇Akihiro Mitsuya¹, Makoto Moriyama¹, Naoya Nakahara¹, Haruka Suzuki¹, Hirotaka Toyoda¹ (1.Nagoya Univ.)

Keywords:IED, DF-CCP