[18a-PB3-1~47] 15.4 III-V-group nitride crystals

[18a-PB3-34] Photoluminescence characterization of GaN exposed to NH₃ plasma

〇Naoto Kumagai^1,3, Hirotomo Itagaki², Tokio Takahashi³, Jaeho Kim^3,1, Hisato Ogiso², Xue-lun Wang^1,3,4, Shingo Hirose², Hajime Sakakita^3,1, Mitsuaki Shimizu^1,4 (1.AIST-NU GaN-OIL, 2.AMRI, AIST, 3.ESPRIT, AIST, 4.IMaSS, Nagoya Univ.)

Keywords:GaN, Photoluminescence, plasma-induced damage