The 80th JSAP Autumn Meeting 2019

Presentation information

Oral presentation

15 Crystal Engineering » 15.7 Crystal characterization, impurities and crystal defects

[18p-C212-1~6] 15.7 Crystal characterization, impurities and crystal defects

Wed. Sep 18, 2019 1:30 PM - 3:00 PM C212 (C212)

Takuo Sasaki(QST)

2:30 PM - 2:45 PM

[18p-C212-5] Oxygen Effect Analysis of Copper Gettering in Hydrocarbon Molecular Ion Impanted Region Using Atom Probe Tomography

Satoshi Shigematsu1, Ryosuke Okuyama1, Ryo Hirose1, Ayumi Masada1, Takeshi Kadono1, Koji Kobayashi1, Akihiro Suzuki1, Yoshihiro Koga1, Kazunari Kurita1 (1.SUMCO)

Keywords:gettering, ion implantation, atom probe tomography

Carbon atoms form agglomerates in hydrocarbon molecular ion implanted region. The carbon atom agglomerates act as gettering sinks of metallic impurity and oxygen. We analyzed influence of gettered oxygen on copper gettering behavior by carbon atom agglomerates using atom probe tomography. We found that copper gettering capability of carbon atom agglomerates depends on the ratio of oxygen to carbon.