[18p-C212-1~6] 15.7 Crystal characterization, impurities and crystal defects

△ [18p-C212-5] Oxygen Effect Analysis of Copper Gettering in Hydrocarbon Molecular Ion Impanted Region Using Atom Probe Tomography

〇Satoshi Shigematsu¹, Ryosuke Okuyama¹, Ryo Hirose¹, Ayumi Masada¹, Takeshi Kadono¹, Koji Kobayashi¹, Akihiro Suzuki¹, Yoshihiro Koga¹, Kazunari Kurita¹ (1.SUMCO)

Keywords:gettering, ion implantation, atom probe tomography

Carbon atoms form agglomerates in hydrocarbon molecular ion implanted region. The carbon atom agglomerates act as gettering sinks of metallic impurity and oxygen. We analyzed influence of gettered oxygen on copper gettering behavior by carbon atom agglomerates using atom probe tomography. We found that copper gettering capability of carbon atom agglomerates depends on the ratio of oxygen to carbon.