[18p-E203-1~16] 12.6 ナノバイオテクノロジー

[18p-E203-6] 高pH 水溶液中での絶縁破壊を用いた、広範囲のサイズ調整が可能なナノポア形成方法

〇柳 至¹、赤堀 玲奈¹、武田 健一¹ (1.日立研開)

キーワード：ナノポア、メンブレン、絶縁破壊

For nanopore sensing of various-sized molecules with high sensitivity, the size of the nanopore should be adjusted according to the size of each target molecule. For solid-state nanopores, a simple and inexpensive nanopore fabrication method utilizing dielectric breakdown of a membrane is widely used. This method is suitable for fabricating a small nanopore. However, it suffers two serious problems when attempting to fabricate a large nanopore: the generation of multiple nanopores and the non-opening failure of a nanopore. In this study, we found that nanopore fabrication by dielectric breakdown of a SiN membrane under high-pH conditions (pH ≥ 11.3) could overcome these two problems and enabled the formation of a single large nanopore up to 40 nm in diameter within one minute.