[18p-E214-1~13] 22.1 Joint Session M "Phonon Engineering"

△ [18p-E214-13] Thermal Conductivity Control for Amorphous Al₂O₃ Thin Films

〇(M2)Chinami Abe¹, Yuichiro Yamashita^2,1, Yukimi Tanaka², Takashi Yagi^2,1, Makoto Kashiwagi¹, Junjun Jia³, Koichiro Hattori², Naoyuki Taketoshi^2,1, Toshihiro Okajima⁴, Yuzo Shigesato¹ (1.Aoyama Gakuin Univ., 2.AIST, 3.Waseda Univ., 4.SAGA-LS)

Keywords:thermophysical property, amorphous, thin film

Thermal conductivities of the amorphous Al₂O₃ films have been known to depend heavily on their densities. In this study, the Al₂O₃ films with the various densities in the wide range were deposited by controlling the total gas pressures (0.5-8.0 Pa) and substrate temperatures (RT, 200, 300℃) during the sputter depositions. As a result, these films showed the large change in the thermal diffusivity by nearly twice. Yang’s modulus od these films was also analyzed quantitatively by the precise nano-indentation in order to discuss in terms of the speed of sound in the films with the different densities.