[18p-E303-1~11] 13.1 Fundamental properties, surface and interface, and simulations of Si related materials

[18p-E303-11] Temperature control of clean room by dynamic simulation and virtual metrology

〇Yuuki Kumagae¹, Narumi Abe¹, Hiroki Obana¹, Ryo Ogasawara², Hiroshi Kubota¹, Takeshi Hashishin¹, Masao Yoshioka² (1.GSST Kumamoto Univ., 2.Kumamoto Univ.)

Keywords:clean room, Temperature control, particle